Microsystem Technologies
A miniaturized bulk micromachined triaxial accelerometer fabricated using deep reactive etching through a multilevel thickness membrane
A novel DMTL capacitive switch with electrostatic actuation MAM capacitors
A passive mechanism for thermal stress regulation in micro-machined beam-type structures
Fabrication and measurements of dynamic response of an SOI based non-planar CMUT array
Fabrication of polymer micro-tip by optical lensing technique
Fabrication of PZT nano dot array and their ferroelectric properties
Investigation of wax and paper materials for the fabrication of paper-based microfluidic devices
Low temperature deposited titanium boride thin films and their application to surface engineering of microscale mold inserts
Manufacturing and replication of glass pyramidal micro-structures by using the injection moulding process
Measurement of contact potential difference in head disk interface by readback signal spectrum
Multi-dofs MEMS displacement sensors based on the Stewart platform theory
Piezoresistive polypropylene–carbon nanofiber composites as mechanical transducers
Polyimide/tetraethoxysilane-based hybrid polyfilms for microelectronics application
Robust regulation and tracking system design for multivariable control of the tape transport mechanism
Static characterization of microstructures using AOMSI and temporal phase-shifting (TPS) methods
Study of dynamic characteristics of resonators for MEMS resonant vibratory gyroscopes